|Publisher DOI:||10.1364/PRJ.4.000126||Title:||Photonic integrated circuit components based on amorphous silicon-on-insulator technology||Language:||English||Authors:||Lipka, Timo
Trieu, Hoc Khiem
|Issue Date:||11-May-2016||Publisher:||OSA||Source:||Photonics Research 3 (4): 126-134 (2016-06-01)||Journal or Series Name:||Photonics research||Abstract (english):||We present integrated-optic building blocks and functional photonic devices based on amorphous silicon-on-insulator technology. Efficient deep-etched fiber-to-chip grating couplers, low-loss single-mode photonic wire waveguides, and compact power splitters are presented. Based on the sub-μm photonic wires, 2 × 2 Mach-Zehnder interferometers and add/drop microring resonators (MRRs) with low device footprints and high finesse up to 200 were realized and studied. Compact polarization rotators and splitters with ≥10 dB polarization extinction ratio were fabricated for the polarization management on-chip. The tuning and trimming capabilities of the material platform are demonstrated with efficient microheaters and a permanent device trimming method, which enabled the realization of energy-efficient photonic circuits. Wavelength multiplexers in the form of cascaded filter banks and 4 × 4 routers based on MRR switches are presented. Fabrication imperfections were analyzed and permanently corrected by an accurate laser-trimming method, thus enabling eight-channel multiplexers with record low metrics of sub-mW static power consumption and ≤1°C temperature overhead. The high quality of the functional devices, the high tuning efficiency, and the excellent trimming capabilities demonstrate the potential to realize low-cost, densely integrated, and ultralow-power 3D-stacked photonic circuits on top of CMOS microelectronics.||URI:||http://hdl.handle.net/11420/5516||ISSN:||2327-9125||Institute:||Mikrosystemtechnik E-7||Type:||(wissenschaftlicher) Artikel||Funded by:||Supported by DFG and TUHH in the funding programme Open Access Publishing.|
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