TUHH Open Research
Help
  • Log In
    New user? Click here to register.Have you forgotten your password?
  • English
  • Deutsch
  • Communities & Collections
  • Publications
  • Research Data
  • People
  • Institutions
  • Projects
  • Statistics
  1. Home
  2. TUHH
  3. Publication References
  4. Test Method for Contactless On-Wafer MEMS Characterization and Production Monitoring
 
Options

Test Method for Contactless On-Wafer MEMS Characterization and Production Monitoring

Publikationstyp
Journal Article
Date Issued
2016-11
Sprache
English
Author(s)
Linz, Sarah  
Oesterle, Florian  
Lindner, Stefan  
Mann, Sebastian  
Weigel, Robert  
Kölpin, Alexander  orcid-logo
TORE-URI
http://hdl.handle.net/11420/6707
Journal
IEEE transactions on microwave theory and techniques  
Volume
64
Issue
11
Start Page
3918
End Page
3926
Article Number
7587394
Citation
IEEE Transactions on Microwave Theory and Techniques 11 (64): 7587394 (2016-11)
Publisher DOI
10.1109/TMTT.2016.2612664
Microelectromechanical systems (MEMS) are widely utilized in various devices ranging from consumer electronics and medical devices to modern industrial equipment. Their fabrication with the help of semiconductor technology leads to very low cost devices. However, the fabrication test systems need to be extended to cover the mechanical domain of MEMS devices. Therefore, this paper presents a new concept that is able to evaluate the stiffness of silicon membranes in MEMS microphones. Due to the use of electromagnetic waves in the millimeter-wave spectrum, an optical line of sight is not necessary. The test setup can be parallelized to improve the throughput, and it can gain important feedback information to tune operating parameters of the production process.
Subjects
Contactless testing
mechanical sensitivity
microelectromechanical system (MEMS) characterization
millimeter-wave metrology
pull in
TUHH
Weiterführende Links
  • Contact
  • Send Feedback
  • Cookie settings
  • Privacy policy
  • Impress
DSpace Software

Built with DSpace-CRIS software - Extension maintained and optimized by 4Science
Design by effective webwork GmbH

  • Deutsche NationalbibliothekDeutsche Nationalbibliothek
  • ORCiD Member OrganizationORCiD Member Organization
  • DataCiteDataCite
  • Re3DataRe3Data
  • OpenDOAROpenDOAR
  • OpenAireOpenAire
  • BASE Bielefeld Academic Search EngineBASE Bielefeld Academic Search Engine
Feedback