Please use this identifier to cite or link to this item: https://doi.org/10.15480/336.3174
Title: Laser-Excited Elastic Guided Waves Reveal the Complex Mechanics of Nanoporous Silicon
Language: English
Authors: Thelen, Marc  
Bochud, Nicolas 
Brinker, Manuel 
Prada, Claire 
Huber, Patrick  
Keywords: laser ultrasonics;guided waves;porous silicon;Elasticity of nanomaterials
Issue Date: 11-Dec-2020
Abstract (english): 
Nanoporosity in silicon leads to completely new functionalities of this mainstream semiconductor. A difficult to assess mechanics has however significantly limited its application in fields ranging from nanofluidics and biosensorics to drug delivery and energy storage. Here, we present a study on laser-excited elastic guided waves detected contactless and non-destructively in dry and liquid-infused single-crystalline porous silicon.These experiments reveal that the selforganised formation of 100 billions of parallel nanopores per squarecentimetre crosssection results in a nearly isotropic elasticity perpendicular to the pore axes and an 80% stiffnessreduction in the material, despite a bulk-like and anisotropic porewall elasticity. Our thorough assessment of the wafer-scale mechanics of nanoporous silicon provides the base for predictive applications in robust on-chip devices and evidences that recent breakthroughs in laser ultrasonics open up entirely new frontiers for in-situ, non-destructive mechanical characterisation of dry and liquid-functionalised porous materials.

Here saved are raw and processed data of laser ultrasonics measurements of porous and bulk silicon.
URI: http://hdl.handle.net/11420/8156
DOI: 10.15480/336.3174
Institute: Center for Integrated Multiscale Material Systems M-2 
Document Type: Dataset
Project: SFB 986: Maßgeschneiderte Multiskalige Materialsysteme - M3 
License: CC0 1.0 (Public Domain Dedication) CC0 1.0 (Public Domain Dedication)
Appears in Collections:Research Data TUHH

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sourcedata(1).zipMeasured data1,16 GBZIPView/Open
sourcedata(2).zipProcessed 2-D FFT data3,23 GBZIPView/Open
description.pdfData description97,23 kBAdobe PDFThumbnail
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