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  4. Laser-Excited Elastic Guided Waves Reveal the Complex Mechanics of Nanoporous Silicon
 
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Laser-Excited Elastic Guided Waves Reveal the Complex Mechanics of Nanoporous Silicon

Citation Link: https://doi.org/10.15480/336.3174
Type
Dataset
Date Issued
2020-12-11
Author(s)
Thelen, Marc  orcid-logo
Bochud, Nicolas  
Brinker, Manuel  orcid-logo
Prada, Claire  
Huber, Patrick  orcid-logo
Language
English
Institute
Center for Integrated Multiscale Material Systems M-2  
DOI
10.15480/336.3174
TORE-URI
http://hdl.handle.net/11420/8156
Is Referenced By
10.1038/s41467-021-23398-0
10.15480/882.3660
Abstract
Nanoporosity in silicon leads to completely new functionalities of this mainstream semiconductor. A difficult to assess mechanics has however significantly limited its application in fields ranging from nanofluidics and biosensorics to drug delivery and energy storage. Here, we present a study on laser-excited elastic guided waves detected contactless and non-destructively in dry and liquid-infused single-crystalline porous silicon.These experiments reveal that the selforganised formation of 100 billions of parallel nanopores per squarecentimetre crosssection results in a nearly isotropic elasticity perpendicular to the pore axes and an 80% stiffnessreduction in the material, despite a bulk-like and anisotropic porewall elasticity. Our thorough assessment of the wafer-scale mechanics of nanoporous silicon provides the base for predictive applications in robust on-chip devices and evidences that recent breakthroughs in laser ultrasonics open up entirely new frontiers for in-situ, non-destructive mechanical characterisation of dry and liquid-functionalised porous materials.

Here saved are raw and processed data of laser ultrasonics measurements of porous and bulk silicon.
Subjects
laser ultrasonics
guided waves
porous silicon
Elasticity of nanomaterials
DDC Class
620: Ingenieurwissenschaften
Funding(s)
SFB 986: Teilprojekt B7 - Polymere in grenzflächenbestimmten Geometrien: Struktur, Dynamik und Funktion an planaren und in porösen Hybridsystemen  
License
https://creativecommons.org/publicdomain/zero/1.0/
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