Publisher DOI: 10.1002/adfm.202003381
Title: Cross-Linked Gold Nanoparticle Composite Membranes as Highly Sensitive Pressure Sensors
Language: English
Authors: Schlicke, Hendrik 
Kunze, Svenja 
Rebber, Matthias 
Schulz, Norbert 
Riekeberg, Svenja 
Trieu, Hoc Khiem 
Vossmeyer, Tobias 
Keywords: gold nanoparticles; MEMS; nanoparticle composites; NEMS; sensors
Issue Date: 1-Oct-2020
Source: Advanced Functional Materials 30 (40): 2003381 (2020-10-01)
Abstract (english): 
In this article, highly sensitive differential pressure sensors based on free-standing membranes of cross-linked gold nanoparticles are demonstrated. The nanoparticle membranes are employed as both diaphragms and resistive transducers. The elasticity and the pronounced resistive strain sensitivity of these nanometer-thin composites enable the fabrication of sensors achieving high sensitivities exceeding 10−3 mbar−1 while maintaining an overall small membrane area. Furthermore, by combining micro-bulge tests with atomic force microscopy and in situ resistance measurements the membranes’ electromechanical responses are studied through precise observation of the concomitant changes of the membranes’ topography. The study demonstrates the high potential of free-standing nanoparticle composites for the fabrication of highly sensitive force and pressure sensors and introduces a unique and powerful method for the electromechanical investigation of these materials.
ISSN: 1616-301X
Journal: Advanced functional materials 
Institute: Mikrosystemtechnik E-7 
Document Type: Article
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