Please use this identifier to cite or link to this item:
Publisher DOI: 10.1038/s41467-021-23398-0
Title: Laser-excited elastic guided waves reveal the complex mechanics of nanoporous silicon
Language: English
Authors: Thelen, Marc  
Bochud, Nicolas 
Brinker, Manuel 
Prada, Claire 
Huber, Patrick  
Issue Date: 14-Jun-2021
Publisher: Nature Publishing Group UK
Source: Nature Communications 12 (1): 3597 (2021-12-01)
Journal: Nature communications 
References: 10.15480/336.3174
Abstract (english): 
Nanoporosity in silicon leads to completely new functionalities of this mainstream semiconductor. A difficult to assess mechanics has however significantly limited its application in fields ranging from nanofluidics and biosensorics to drug delivery, energy storage and photonics. Here, we present a study on laser-excited elastic guided waves detected contactless and non-destructively in dry and liquid-infused single-crystalline porous silicon. These experiments reveal that the self-organised formation of 100 billions of parallel nanopores per square centimetre cross section results in a nearly isotropic elasticity perpendicular to the pore axes and an 80% effective stiffness reduction, altogether leading to significant deviations from the cubic anisotropy observed in bulk silicon. Our thorough assessment of the wafer-scale mechanics of nanoporous silicon provides the base for predictive applications in robust on-chip devices and evidences that recent breakthroughs in laser ultrasonics open up entirely new frontiers for in-situ, non-destructive mechanical characterisation of dry and liquid-functionalised porous materials.
DOI: 10.15480/882.3660
ISSN: 2041-1723
Institute: Material- und Röntgenphysik M-2 
Document Type: Article
Funded by: Deutsche Forschungsgemeinschaft (DFG) 
More Funding information: C.P. acknowledges the support of LABEX WIFI (within the French Program "Investments for the Future”) under references ANR-10-LABX-24 and ANR-10-IDEX-0001-02 PSL*. N.B. acknowledges the Univ Paris-Est Creteil for the "Support for research for newly appointed Associate Professors”.
Project: SFB 986: Teilprojekt B7 - Polymere in grenzflächenbestimmten Geometrien: Struktur, Dynamik und Funktion an planaren und in porösen Hybridsystemen 
Dynamische Elektrobenetzung an Nanoporösen Oberflächen: Schaltbare Tropfenspreitung, Imbition und Elastokapillarität 
Projekt DEAL 
License: CC BY 4.0 (Attribution) CC BY 4.0 (Attribution)
Appears in Collections:Publications with fulltext

Files in This Item:
File Description SizeFormat
s41467-021-23398-0.pdfVerlags-PDF2,1 MBAdobe PDFView/Open
s41467-021-24354-8.pdfVerlags-Korrektur330,9 kBAdobe PDFView/Open
Show full item record

Page view(s)

checked on Jul 23, 2021


checked on Jul 23, 2021

Google ScholarTM


Note about this record

Cite this record

Download all

This item is licensed under a Creative Commons License Creative Commons