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Laser-excited elastic guided waves reveal the complex mechanics of nanoporous silicon
Citation Link: https://doi.org/10.15480/882.3660
Publikationstyp
Journal Article
Date Issued
2021-06-14
Sprache
English
Institut
TORE-DOI
TORE-URI
Journal
Volume
12
Issue
1
Article Number
3597
Citation
Nature Communications 12 (1): 3597 (2021-12-01)
Publisher DOI
Scopus ID
PubMed ID
34127659
Publisher
Nature Publishing Group UK
Nanoporosity in silicon leads to completely new functionalities of this mainstream semiconductor. A difficult to assess mechanics has however significantly limited its application in fields ranging from nanofluidics and biosensorics to drug delivery, energy storage and photonics. Here, we present a study on laser-excited elastic guided waves detected contactless and non-destructively in dry and liquid-infused single-crystalline porous silicon. These experiments reveal that the self-organised formation of 100 billions of parallel nanopores per square centimetre cross section results in a nearly isotropic elasticity perpendicular to the pore axes and an 80% effective stiffness reduction, altogether leading to significant deviations from the cubic anisotropy observed in bulk silicon. Our thorough assessment of the wafer-scale mechanics of nanoporous silicon provides the base for predictive applications in robust on-chip devices and evidences that recent breakthroughs in laser ultrasonics open up entirely new frontiers for in-situ, non-destructive mechanical characterisation of dry and liquid-functionalised porous materials.
DDC Class
530: Physik
600: Technik
Funding Organisations
More Funding Information
C.P. acknowledges the support of LABEX WIFI (within the French Program "Investments for the Future”) under references ANR-10-LABX-24 and ANR-10-IDEX-0001-02 PSL*. N.B. acknowledges the Univ Paris-Est Creteil for the "Support for research for newly appointed Associate Professors”.
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