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Publisher DOI: 10.1038/s41467-021-23398-0
Title: Laser-excited elastic guided waves reveal the complex mechanics of nanoporous silicon
Language: English
Authors: Thelen, Marc  
Bochud, Nicolas 
Brinker, Manuel  
Prada, Claire 
Huber, Patrick  
Issue Date: 14-Jun-2021
Publisher: Nature Publishing Group UK
Source: Nature Communications 12 (1): 3597 (2021-12-01)
Abstract (english): 
Nanoporosity in silicon leads to completely new functionalities of this mainstream semiconductor. A difficult to assess mechanics has however significantly limited its application in fields ranging from nanofluidics and biosensorics to drug delivery, energy storage and photonics. Here, we present a study on laser-excited elastic guided waves detected contactless and non-destructively in dry and liquid-infused single-crystalline porous silicon. These experiments reveal that the self-organised formation of 100 billions of parallel nanopores per square centimetre cross section results in a nearly isotropic elasticity perpendicular to the pore axes and an 80% effective stiffness reduction, altogether leading to significant deviations from the cubic anisotropy observed in bulk silicon. Our thorough assessment of the wafer-scale mechanics of nanoporous silicon provides the base for predictive applications in robust on-chip devices and evidences that recent breakthroughs in laser ultrasonics open up entirely new frontiers for in-situ, non-destructive mechanical characterisation of dry and liquid-functionalised porous materials.
DOI: 10.15480/882.3660
ISSN: 2041-1723
Journal: Nature communications 
Institute: Material- und Röntgenphysik M-2 
Document Type: Article
Project: SFB 986: Teilprojekt B7 - Polymere in grenzflächenbestimmten Geometrien: Struktur, Dynamik und Funktion an planaren und in porösen Hybridsystemen 
Dynamische Elektrobenetzung an Nanoporösen Oberflächen: Schaltbare Tropfenspreitung, Imbition und Elastokapillarität 
Publikationsfonds 2021 
Funded by: Deutsche Forschungsgemeinschaft (DFG) 
More Funding information: C.P. acknowledges the support of LABEX WIFI (within the French Program "Investments for the Future”) under references ANR-10-LABX-24 and ANR-10-IDEX-0001-02 PSL*. N.B. acknowledges the Univ Paris-Est Creteil for the "Support for research for newly appointed Associate Professors”.
License: CC BY 4.0 (Attribution) CC BY 4.0 (Attribution)
References: 10.15480/336.3174
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