Hydrogenated amorphous silicon photonic device trimming by UV-irradiation

Publikationstyp
Journal Article
Date Issued
2014
Sprache
English
Author(s)
Lipka, Timo  
Kiepsch, Melanie  
Trieu, Hoc Khiem  
Müller, Jörg  
Institut
Mikrosystemtechnik E-7  
TORE-URI
http://hdl.handle.net/11420/9945
Journal
Optics express  
Volume
22
Issue
10
Start Page
12122
End Page
12132
Citation
Optics Express 22 (10): 12122-12132 (2014)
Publisher DOI
10.1364/OE.22.012122
Scopus ID
2-s2.0-84901246384
Publisher
Optical Society of America
A method to compensate for fabrication tolerances and to fine-tune individual photonic circuit components is inevitable for waferscale photonic systems even with most-advanced CMOS-fabrication tools. We report a cost-effective and highly accurate method for the permanent trimming of hydrogenated amorphous silicon photonic devices by UV-irradiation. Microring resonators and Mach-Zehnder-interferometers were utilized as photonic test devices. The MZIs were tuned forth and back over their complete free spectral range of 5.5 nm by locally trimming the two MZI-arms. The trimming range exceeds 8 nm for compact ring resonators with trimming accuracies of 20pm. Trimming speeds of ≥ 10 GHz/s were achieved. The components did not show any substantial device degradation. © 2014 Optical Society of America.
DDC Class
530: Physik