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Equipment
Atomic Layer Deposition Picosun R200 Advanced
Equipment description
Name
Atomic Layer Deposition Picosun R200 Advanced
Manufacturer
Picosun (Finland)
DOI
10.15480/882.14374
Internal ID
36502005213-00
Classification
0920 -- Atom- und Molekularstrahl-Apparaturen
Access
Owner Organisation
Mikrosystemtechnik E-7
Contact Person
Trieu, Hoc Khiem
Available since
June 16, 2015