a-Si:H platform - Bio sensor on the basis of integrated photonics
December 1, 2013
December 31, 2020
Photonics is a key technology for sensors, signal processing and communication technology. Integrated photonics is appropriate for the integration of photonic circuits on wafer level. The Institute of Microsystems Technology has established a platform based on amorphous silicon (a-Si:H) which in contrast to the widespread single crystal SOI (silicon on insulator) approach can be flexibly deposited on various substrates by PECVD. A bio sensor is developed on the basis of this a-Si:H platform which can be operated without large equipment such as tunable laser and optical spectrum analyzer enabling true photonic Lab on a chip systems.