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  4. a-Si:H platform - Bio sensor on the basis of integrated photonics
 
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Akronym
a-Si:H Platfform
Projekt Titel
a-Si:H platform - Bio sensor on the basis of integrated photonics
Startdatum
December 1, 2013
Enddatum
December 31, 2020
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Förderorganisation
Technische Universität Hamburg 
Institut
Mikrosystemtechnik E-7 
Projektleitung
Trieu, Hoc Khiem 
Mitarbeitende
Vermeer, Matthias 
Alhareeb, Nadeem 
Moldenhauer, Lennart 
Lipka, Timo 
Photonics is a key technology for sensors, signal processing and communication technology. Integrated photonics is appropriate for the integration of photonic circuits on wafer level. The Institute of Microsystems Technology has established a platform based on amorphous silicon (a-Si:H) which in contrast to the widespread single crystal SOI (silicon on insulator) approach can be flexibly deposited on various substrates by PECVD. A bio sensor is developed on the basis of this a-Si:H platform which can be operated without large equipment such as tunable laser and optical spectrum analyzer enabling true photonic Lab on a chip systems.
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