Biosensor auf Basis integrierter Photonik


Project Acronym
a-Si:H Platfform
 
Project Title
a-Si:H platform - Bio sensor on the basis of integrated photonics
 
 
Principal Investigator
 
 
Status
Abgeschlossen
 
Duration
01-12-2013
-
31-12-2020
 
Funding Organization
 
Project Abstract
Photonics is a key technology for sensors, signal processing and communication technology. Integrated photonics is appropriate for the integration of photonic circuits on wafer level. The Institute of Microsystems Technology has established a platform based on amorphous silicon (a-Si:H) which in contrast to the widespread single crystal SOI (silicon on insulator) approach can be flexibly deposited on various substrates by PECVD. A bio sensor is developed on the basis of this a-Si:H platform which can be operated without large equipment such as tunable laser and optical spectrum analyzer enabling true photonic Lab on a chip systems.
 

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