Optofluidic a-Si:H-based photonic lab-on-chip with dispersion engineered resonance spectra

Publikationstyp
Journal Article
Date Issued
2017-01-11
Sprache
English
Author(s)
Moldenhauer, Lennart  
Lipka, Timo  
Venegas-Rojas, Daybith  
Igeta, Ken 
Trieu, Hoc Khiem  
Institut
Mikrosystemtechnik E-7  
TORE-URI
http://hdl.handle.net/11420/3751
Journal
IEEE photonics technology letters  
Volume
29
Issue
4
Start Page
412
End Page
415
Citation
IEEE Photonics Technology Letters 4 (29): 412-415 (2017-02-15)
Publisher DOI
10.1109/LPT.2017.2651980
Scopus ID
2-s2.0-85015160627
Publisher
IEEE
We report on a lab-on-chip sensor system based on integrated-optical resonators. The photonic components were realized in CMOS-process compatible amorphous silicon and the microfluidic interface enabling directed analyte transport was fabricated with soft-lithography technology. The developed sensor features optical resonators with dispersion engineered resonance spectra (DERS) to match optical resonance peaks over a wavelength region of several free spectral ranges. Resonance shifts caused by changes in refractive index of the investigated analyte are tracked by red-shifting a reference spectrum through the thermo-optic effect using electrical micro-heaters. With the DERS preserving the unambiguousness of the direct proportional relation between resonance shift and necessary heating power, this sensing principle enables direct electronic readout of analyte property changes. The sensor system therefore reduces the number and the size of peripheral devices usually necessary for the analysis of integrated optical devices, resulting in a broader range of potential application scenarios.
Subjects
a-Si:H
Amorphous silicon
integrated optics
lab-on-chip
micro-heater
micro-resonator
optical sensor
thermo-optic effect
tracing
DDC Class
600: Technik