Manufacturing variability estimations for deposited silicon photonic circuits

Publikationstyp
Conference Paper
Date Issued
2017-10-26
Sprache
English
Author(s)
Lipka, Timo  
Trieu, Hoc Khiem  
Institut
Mikrosystemtechnik E-7  
TORE-URI
http://hdl.handle.net/11420/3750
Start Page
65
End Page
66
Citation
14th International Conference on Group IV Photonics, GFP 2017: 65-66 (2017)
Contribution to Conference
14th International Conference on Group IV Photonics, GFP 2017  
Publisher DOI
10.1109/GROUP4.2017.8082198
Scopus ID
2-s2.0-85040201555
Publisher
IEEE
We present a comprehensive study of deposited silicon microring resonators for photonic-integrated circuitry. Refractive index, thickness, and widths variations are estimated. The statistical deviations are sufficiently low to realize photonic circuits of high quality for instance deposited on various substrates and integrated with heterogeneous materials.
Subjects
Manufacturing quality amorphous silicon (a-Si:H)
Microring resonators
Photonic integrated circuits
DDC Class
600: Technik