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Role of slice thickness quantification in the 3D reconstruction of FIB tomography data of nanoporous materials
Citation Link: https://doi.org/10.15480/882.8820
Publikationstyp
Journal Article
Date Issued
2024-02
Sprache
English
Author(s)
Sardhara, Trushal
TORE-DOI
Journal
Volume
256
Start Page
1
End Page
9
Article Number
113878
Citation
Ultramicroscopy 256: 1-9 (2024)
Publisher DOI
Scopus ID
Publisher
Elsevier
In focused ion beam (FIB) tomography, a combination of FIB with a scanning electron microscope (SEM) is used for collecting a series of planar images of the microstructure of nanoporous materials. These planar images serve as the basis for reconstructing the three-dimensional microstructure through segmentation algorithms. However, the assumption of a constant distance between consecutively imaged sections is generally invalid due to random variations in the FIB milling process. This variation complicates the accurate reconstruction of the three-dimensional microstructure. Using synthetic FIB tomography data, we present an algorithm that repositions slices according to their actual thickness and interpolates the results using machine learning-based methods. We applied our algorithm to real datasets, comparing two standard approaches of microstructure reconstruction: on-the-fly via image processing and ruler-based via sample structuring. Our findings indicate that the ruler-based method, combined with our novel slice repositioning and interpolation algorithm, exhibits superior performance in reconstructing the microstructure.
Subjects
Accurate reconstruction
FIB
Image inpainting
Slice repositioning
Slice thickness determination
MLE@TUHH
DDC Class
620: Engineering
Publication version
publishedVersion
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1-s2.0-S030439912300195X-main.pdf
Type
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Size
2.75 MB
Format
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