Title: High Refractive Index Integrated Photonics on Glass Substrates
Language: English
Authors: Lipka, Timo 
Bosnjak, B. 
Alhareeb, Nadeem 
Rennpferdt, Lukas 
Vermeer, Matthias 
Blick, Robert H. 
Trieu, Hoc Khiem 
Issue Date: Nov-2021
Source: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte für zukunftsfahige Markte - MikroSystemTechnik Congress (2021)
Abstract (english): 
Silicon photonic circuits based on high index contrast waveguides for near-infrared applications are commonly manufactured on commercially available crystalline silicon-on-insulator (SOI) or on oxidized silicon wafers if the waveguide core layer is fabricated by deposition methods. We present a novel manufacturing approach of compact amorphous silicon photonic circuit components directly deposited and patterned on fused silica glass wafers. The additional substrate transparency at the visible wavelengths region, an increased thermal heating efficiency of the integrated components, and the ease of alignment of photonic backplanes on underlying photonic or electronic microchips are some advantages to highlight compared to oxidized silicon substrates.
Conference: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte für zukunftsfahige Markte - MikroSystemTechnik Congress 2021 
URI: http://hdl.handle.net/11420/11832
ISBN: 978-380075657-5
Institute: Mikrosystemtechnik E-7 
Document Type: Chapter/Article (Proceedings)
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