DC FieldValueLanguage
dc.contributor.authorLipka, Timo-
dc.contributor.authorHorn, Oliver-
dc.contributor.authorAmthor, Julia-
dc.contributor.authorMüller, Jörg-
dc.date.accessioned2019-09-13T06:40:45Z-
dc.date.available2019-09-13T06:40:45Z-
dc.date.issued2012-08-29-
dc.identifier.citationJournal of the European Optical Society (7): Art.-Nr. 12033 (2012)de_DE
dc.identifier.issn1990-2573de_DE
dc.identifier.urihttp://hdl.handle.net/11420/3356-
dc.description.abstractThis paper reports about hydrogenated amorphous silicon which can be employed as low-loss optical material for small footprint and cost-effective photonic integrated circuits. Basic waveguides, photonic wire based couplers, Mach-Zehnder interferometers, ring resonators and Mach-Zehnder assisted ring resonators were designed, fabricated, and optically characterised. The propagation loss of rib and photonic wire waveguides were determined to be 2 dB/cm and 5.3 dB/cm, respectively. The 90° bending losses of 5 μm curved photonic wires were determined to be 0.025 dB/90°. Three-dimensional tapers, which were fabricated without additional etching steps and were deposited on top of the fabricated photonic wires showed a net coupling loss of 4 dB/port. Multimode 3 dB-splitters were systematically investigated resulting in 49-51% splitting ratios. Mach-Zehnder interferometers that were realised with these splitters showed interference fringe depths of up to 25 dB for both polarisations. Compact ring resonators with 10 μm radius implemented as notch filters and in Mach-Zehnder coupled configurations provided extinction ratios of ≥20 dB and Q-factors up to 7500.en
dc.language.isoende_DE
dc.publisherEuropean Optical Societyde_DE
dc.relation.ispartofJournal of the European Optical Societyde_DE
dc.subjectAmorphous siliconde_DE
dc.subjectDielectric thin filmsde_DE
dc.subjectIntegrated opticsde_DE
dc.subjectPhotonicsde_DE
dc.subjectResonatorsde_DE
dc.subject.ddc530: Physikde_DE
dc.titleLow-loss multilayer compatible a-Si:H optical thin films for photonic applicationsde_DE
dc.typeArticlede_DE
dc.type.diniarticle-
dc.subject.ddccode530-
dcterms.DCMITypeText-
tuhh.abstract.englishThis paper reports about hydrogenated amorphous silicon which can be employed as low-loss optical material for small footprint and cost-effective photonic integrated circuits. Basic waveguides, photonic wire based couplers, Mach-Zehnder interferometers, ring resonators and Mach-Zehnder assisted ring resonators were designed, fabricated, and optically characterised. The propagation loss of rib and photonic wire waveguides were determined to be 2 dB/cm and 5.3 dB/cm, respectively. The 90° bending losses of 5 μm curved photonic wires were determined to be 0.025 dB/90°. Three-dimensional tapers, which were fabricated without additional etching steps and were deposited on top of the fabricated photonic wires showed a net coupling loss of 4 dB/port. Multimode 3 dB-splitters were systematically investigated resulting in 49-51% splitting ratios. Mach-Zehnder interferometers that were realised with these splitters showed interference fringe depths of up to 25 dB for both polarisations. Compact ring resonators with 10 μm radius implemented as notch filters and in Mach-Zehnder coupled configurations provided extinction ratios of ≥20 dB and Q-factors up to 7500.de_DE
tuhh.publisher.doi10.2971/jeos.2012.12033-
tuhh.publication.instituteMikrosystemtechnik E-7de_DE
tuhh.type.opus(wissenschaftlicher) Artikel-
tuhh.institute.germanMikrosystemtechnik E-7de
tuhh.institute.englishMikrosystemtechnik E-7de_DE
tuhh.gvk.hasppnfalse-
dc.type.driverarticle-
dc.type.casraiJournal Article-
tuhh.container.volume7de_DE
dc.relation.projectFOR 653: Aktive und abstimmbare mikrophotonische Systeme auf der Basis von Silicon-On-Insulator (SOI)de_DE
dc.identifier.scopus2-s2.0-84872955813-
tuhh.container.articlenumber12033de_DE
local.funding.infoDeutsche Forschungsgemeinschaft (DFG)de_DE
datacite.resourceTypeJournal Article-
datacite.resourceTypeGeneralText-
item.creatorOrcidLipka, Timo-
item.creatorOrcidHorn, Oliver-
item.creatorOrcidAmthor, Julia-
item.creatorOrcidMüller, Jörg-
item.grantfulltextnone-
item.creatorGNDLipka, Timo-
item.creatorGNDHorn, Oliver-
item.creatorGNDAmthor, Julia-
item.creatorGNDMüller, Jörg-
item.mappedtypeArticle-
item.openairecristypehttp://purl.org/coar/resource_type/c_6501-
item.fulltextNo Fulltext-
item.cerifentitytypePublications-
item.languageiso639-1en-
item.openairetypeArticle-
crisitem.author.deptMikrosystemtechnik E-7-
crisitem.author.deptMikrosystemtechnik E-7-
crisitem.author.deptMikrosystemtechnik E-7-
crisitem.author.deptMikrosystemtechnik E-7-
crisitem.author.orcid0000-0003-4942-1669-
crisitem.author.parentorgStudiendekanat Elektrotechnik, Informatik und Mathematik (E)-
crisitem.author.parentorgStudiendekanat Elektrotechnik, Informatik und Mathematik (E)-
crisitem.author.parentorgStudiendekanat Elektrotechnik, Informatik und Mathematik (E)-
crisitem.author.parentorgStudiendekanat Elektrotechnik, Informatik und Mathematik (E)-
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