Publisher DOI: 10.1364/OL.42.001084
Title: Optofluidic biomolecule sensors based on a-Si:H microrings embedded in silicon-glass microchannels
Language: English
Authors: Lipka, Timo 
Moldenhauer, Lennart 
Mirbach-Wahn, Lennart von 
Trieu, Hoc Khiem 
Issue Date: 6-Mar-2017
Publisher: Soc.
Source: Optics Letters 6 (42): 1084-1087 (2017)
Journal or Series Name: Optics letters 
Abstract (english): The large-scale and low-cost fabrication of high sensitivity sensors for the real-time detection of biochemicals and molecular substances opens up new opportunities in the areas of bioanalytic screening and medical diagnostics. Planar integrated photonic resonators that can be fabricated with a low footprint, in spatial and wavelength multiplexed arrangements, and that enable integration with microfluidics on the wafer scale have emerged as a promising sensing platform for these application fields. We realized an optofluidic and label-free biosensor that is based on hydrogenated amorphous silicon microring resonators embedded in silicon/glass microfluidic channels for analyte injection and biomolecule immobilization. The optofluidic sensor merits for refractive index and biomolecule sensing are evaluated by sensitivity and detection limit simulations, whereas a proof of concept is demonstrated by real-time protein immobilization experiments of functionalized resonators.
ISSN: 1539-4794
Institute: Mikrosystemtechnik E-7 
Type: (wissenschaftlicher) Artikel
Project: Biosensor auf Basis integrierter Photonik 
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