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Item type:Publication, Access status: with files , Design und Herstellung eines planar integrierten Mikromassenspektrometers mit Micro-Channel-Plate-Detektor(2010); This work describes the development of a micro-mass-spectrometer with the methods of microsystem technologies. All components of the mass spectrometer are combined in a planar design of a 7 x 10 mm² chip fabricated out of glass and silicon. This work focuses on the development of the MEMS fabrication and on the operation of a micro-channel-plate (MCP) in a self-aligning fixture structured out of silicon.Publicationtype: Doctoral Thesis566 1307