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Item type:Publication, Access status: with files , Planar integriertes Mikromassenspektrometer : Simulation, Ansteuerung und Charakterisierung(2009); The concept, development and characterization of the planar integrated micro mass spectrometer (PIMMS), fabricated in microsystems technology, is presented. Key topics are the calculation and simulation of ion trajectories, the generation of electrons by a micro plasma and the control electronics. The measurement of mass spectra with the PIMMS shows the experimental proof of concept.Publicationtype: Doctoral Thesis588 1175