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    Multiparameter Sensornetzwerk für die Meeresforschung
    Publicationtype: Doctoral Thesis
      136
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      70
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    Herstellung und Analyse thermisch oxidierter SOI-Nanowires
    Publicationtype: Doctoral Thesis
      457  2437
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    Automatischer externer Fixateur auf der Basis einer parallelen Roboterkinematik für die Behandlung von Frakturen und die Korrektur von Fehlstellungen
    External fixators are used in fracture treatment and deformity correction. Ring fixators with parallel kinematics allow for universal three-dimensional movements while being adjusted manually. An automatic external fixator is presented, which represents a mobile robot attached to the patient’s bone. Movements are generated with electric motors while sensors can measure the acting forces. After testing of the components, the successful clinical application of the robotic fixator is shown.
    Publicationtype: Doctoral Thesis
      705  2460
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    Design und Herstellung eines planar integrierten Mikromassenspektrometers mit Micro-Channel-Plate-Detektor
    This work describes the development of a micro-mass-spectrometer with the methods of microsystem technologies. All components of the mass spectrometer are combined in a planar design of a 7 x 10 mm² chip fabricated out of glass and silicon. This work focuses on the development of the MEMS fabrication and on the operation of a micro-channel-plate (MCP) in a self-aligning fixture structured out of silicon.
    Publicationtype: Doctoral Thesis
      566  1307
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    Amorphous silicon for the application in integrated optics
    New fields of application for amorphous silicon in integrated optics are developed. First, the influence of deposition method and process parameters on the material properties is investigated. The effects of thermal treatments are analyzed. Low-loss, monomode waveguides are fabricated. Then, a low-temperature PECVD process is used to realize a three-dimensional taper concept with shadow masks. The feasibility to stack waveguides application of a planarization process is studied, and vertical coupling between waveguides is simulated in order to estimate process specifications. Furthermore, waveguides with horizontal slots are fabricated.
    Publicationtype: Doctoral Thesis
      986  1725
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    Planar integriertes Mikromassenspektrometer : Simulation, Ansteuerung und Charakterisierung
    The concept, development and characterization of the planar integrated micro mass spectrometer (PIMMS), fabricated in microsystems technology, is presented. Key topics are the calculation and simulation of ion trajectories, the generation of electrons by a micro plasma and the control electronics. The measurement of mass spectra with the PIMMS shows the experimental proof of concept.
    Publicationtype: Doctoral Thesis
      588  1171
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    Untersuchung von Schichtsystemen für kristallisierte Dünnschichtsiliziumsolarzellen auf Glas
    The material efford for thin film silicon solar cells on floatglass is significantly lower than for wafer based cells. Polycrystalline silicon films have been produced by zone melting crystallisation with a focussed electron beam. Layer systems based on glass, tungsten W, tungstennitride WN,siconcarbide SiC and silicon Si were produced and analysed. Realised solar cells based on these layer systems showed an efficiency of 1.75%.
    Publicationtype: Doctoral Thesis
      565  1127