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Item type:Publication, Access status: without files , Three-dimensional electron backscattered diffraction analysis of deformation in MgO micropillars(2011-11); ; ; ; Small-scale testing is extensively used to study the effects of size on plasticity or characterise plastic deformation of brittle materials, where cracking is suppressed on the microscale. Geometrical and experimental constraints have been shown to affect small-scale deformation and efforts are underway to understand these better. However, current analytical techniques tend to possess high resolution in only one or two dimensions, impeding a detailed analysis of the entire deformed volume. Here electron backscattered diffraction in three dimensions is presented as a way of characterising three-dimensional (3-D) deformation at high spatial resolution. It is shown that, by reconstruction of compressed and then successively sliced and indexed MgO micropillars, this 3-D technique yields information complementary to μ-Laue diffraction or electron microscopy, allowing a correlation of experimental artefacts and the distribution of plasticity. In addition, deformation features which are difficult to visualise by standard scanning electron microscopy are easily detected, for example where only small surface traces are produced or minimal plastic strain can be introduced before failure in brittle materials.Publicationtype: Journal Article16 - Some of the metrics are blocked by yourconsent settings
Item type:Publication, Access status: without files , A practical approach to test the scope of FIB-SEM 3D reconstruction(2010-08-09); State-of-the-art focused ion beam (FIB) instruments have an ion column for sample modification and an electron column for scanning electron microscopy (SEM). 3D reconstruction of a sample volume can be achieved by serial sectioning using the FIB in combination with high-resolution SEM imaging of each cross-section. Usually, the resolution in the direction in which the sections are milled (z-direction) is much lower than in the plane of the cross-section (xy-direction) itself. Increased sampling in the z-direction can only be achieved by decreasing the distance between single sections. For a constant volume this is equivalent to increasing the number of sections, i.e. time and effort. To perform efficient 3D reconstructions the effect of the reduced sampling in the z-direction to the overall accuracy of the 3D reconstruction has to be known. We tested this approach with FIB conical test structures that were slice-and-view processed and subsequently reconstructed. Using a reference data set with a slice thickness (z-resolution) of 22 nm, data with z-resolutions ranging from 44 nm to 440 nm were created and reconstructed with commercial software. The calculated volumes for the simulated z-resolutions and their deviations from the reference volume are shown. Deviations of up to 35% occur and reach about 10% once the z-resolution was one fifth of the upper diameter of the conical structures.Publicationtype: Conference Paper24