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On the combination of pyrolysis and plasma to create Parylene C thin films
Other Titles
Zur Kombination von Pyrolyse und Plasma zur Herstellung neuartiger Parylen C-Schichten
Publikationstyp
Conference Paper
Date Issued
2025
Sprache
English
Start Page
112
End Page
114
Citation
11. MikroSystemTechnik Kongress 2025
Contribution to Conference
Publisher DOI
Publisher
VDE e.V.
ISBN of container
978-3-8007-6614-7
978-3-8007-6615-4
Pyrolysis for Parylene C deposition is a safe way to produce biocompatible hermetic thin films above 1 µm. For thin films below that thickness, the use of plasma is a well-researched process, but these films lack biocompatibility. With the combination of pyrolysis and Argon-plasma (30 W, 50 W), a new process was used to create Parylene C thin films and investigate thickness, Young’s Modulus, FTIR spectra, and the surface via SEM. The use of 50 W Argon-plasma shows an increase of thickness (1.6 µm) and Young’s Modulus (26.34 GPa) compared to pyrolysis (t=0.9 µm, E=7 GPa).
DDC Class
620: Engineering