Filters

Settings

Now showing1 - 2 of 2
  • Some of the metrics are blocked by your 
    consent settings
    Item type:Publication, Access status: without files ,
    A new approach on MEMS sensor batch testing using an analogue parallel test methodology for massive reduction of test time
    (2013-11)
    Oesterle, Florian
    ;
    Weigel, Robert
    ;
    Kölpin, Alexander
    With a tremendous shipment increase of MEMS microphones during the last few years, enhanced testing methods have become a key issue for industrial batch manufacturing, focusing on the mechanical sensitivity of the sound transducing diaphragm. Instead of semi-parallel techniques, in which test channels and measurement equipment are duplicated (with a multiplication of invest) for the purpose of further reduction of test time, this paper shows a novel approach for a massive parallel test of MEMS sensors. With several DUTs connected in parallel, the resulting measurements hence reveal several overlain device characteristics, each accounting for the sensitivity of one single DUT. For the specific correlation of those characteristics to each DUT, a reconstruction method known from tomography imaging techniques is adapted. The measurement results on wafer level shown in this paper exhibit the basic suitability of a single test of several DUTs in parallel and prove the concept of this novel method.
    Publicationtype: Conference Paper
      148
  • Some of the metrics are blocked by your 
    consent settings
    Item type:Publication, Access status: without files ,
    Dual Six-Port based direction-of-arrival detector for FMCW radar tracking in the ISM band at 24GHz
    (2013-11)
    Vinci, Gabor
    ;
    Lindner, Stefan
    ;
    Mann, Sebastian
    ;
    Barbon, Francesco
    ;
    Weigel, Robert
    The introduction of the Six-Port receiver as a Direction-of-Arrival (DOA) detector for microwave signals brought new possibilities for countless positioning and tracking techniques thanks to its highly accurate phase measurement capability. Up to now DOA detection of a single frequency continous wave (CW) signal source has been performed. On the other hand, detection of sources with variable signal frequency is of great interest. In this paper, the DOA detection of an FMCW radar source with a dual Six-Port demonstrator working in the Industrial-Scientific-Medical (ISM) band at 24GHz is presented. Measurement results demonstrate the detection robustness of the system and show frequency dependancy of the detection accuracy.
    Publicationtype: Conference Paper
      80